About: http://webisa.webdatacommons.org/92989733

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a longitudinal section through a micromechanical layer arrangement, having a recess introduced into the surface of a layer stack, in which a bump for a flip chip connection is arranged;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au