About: http://webisa.webdatacommons.org/93152001

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a schematic cross sectional view of the substrate showing another step in the method of the invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au