About: http://webisa.webdatacommons.org/93153766

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic of the equipment needed to carry out multiple layer deposition according to the invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au