| http://www.w3.org/ns/prov#value | - FIG. 7D is a perspective view in a case where the valve-element urging means is provided on the underside of the valve-equipped chip. [0095] In FIGS. 7A and 7B, reference character 2 b* denotes a holding member for fixing the valve-equipped chip 1, i.e., the fluid control chip.
|
