About: http://webisa.webdatacommons.org/9326950

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment wherein the substrate has a substrate size about 370 mm???470 mm, the SiH4 gas may be supplied at a flow rate less than about 50 sccm, such as between about 1 sccm and about 20 sccm, into the processing chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com