About: http://webisa.webdatacommons.org/93287155

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS devices such as pressure sensors and actuators may be assembled on-flexible substrates using flip-chip-on-board (???FCOB???) technology.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com