About: http://webisa.webdatacommons.org/93303949

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, one of the sources could, if desired, be an ion source configured to operate in a single mode, i.e., either to implant or deposit ions on the seed or intermix layer created with the dual mode single ion source.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de