About: http://webisa.webdatacommons.org/93311050

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Exemplary embodiments include polishing machines with various types and numbers of polishing units such as those by Applied Materials, PEC/Speedfam, Ebara, Lam, Strassbaugh, and other vendors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com