About: http://webisa.webdatacommons.org/93515801

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method aspect of the present invention is a method of storing a mask in a container comprising first and second sections which are both cleaned to remove particles thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com