About: http://webisa.webdatacommons.org/9370645

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this example, the pattern is bisected, two kinds of masks are prepared and a double exposure is applied, so that the phase shifting method is applicable irrespective of the pattern shape, and even a fine pattern can be formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es