About: http://webisa.webdatacommons.org/9406001

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In forming the oxide of tungsten, the composition thereof is not particularly limited, and it may be determined based on etching rate or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca