About: http://webisa.webdatacommons.org/94203935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The organic ARC is selected from materials such as poly(vinyl pyridine), polyimide, or anegative photoresist material containing a DUV dye.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com