| http://www.w3.org/ns/prov#value | - The protrusion 22 b that functions also as a spacer is not limited to a protrusion having a truncated cone shape as illustrated in FIG. 30A and FIG. 30B. For example, the protrusion 22 b may have a shape as illustrated in FIG. 33 such that the cross section thereof in a plane vertical to the substrate plane is a part of an ellipse (i.e., a shape such as a part of an elliptical sphere).
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