About: http://webisa.webdatacommons.org/94358079

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The same types of chemical and mechanical mechanisms occur during CMP of the other metals, such as titanium, titanium nitride, copper, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de