About: http://webisa.webdatacommons.org/94475764

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The system can be incorporated into polishing systems made by OEMs such as Applied Materials, Ebara, IPEC/Planar, Speedfam, and Strasbaugh.
http://www.w3.org/ns/prov#wasQuotedFrom	globalspec.com