About: http://webisa.webdatacommons.org/94582139

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These materials may be deposited by such techniques as chemical vapor deposition, electron beam vapor deposition, sputtering, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com