About: http://webisa.webdatacommons.org/94610282

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protection layer preferably is formed as an inorganic layer, for example a silicon oxide or silicon nitride layer, but for special processing steps it can also be an organic layer made of photoresist, teflon, parylene.
http://www.w3.org/ns/prov#wasQuotedFrom	sumobrain.com