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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The metals and silicides, such as Ti, Ta, Co, Ni, W, WSi2, CoSi2, NiSi2, TiSi2, TaSi2, and MoSi2, are commonly used in the silicon CMOS tec
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com