About: http://webisa.webdatacommons.org/94648150

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The members 22, 24 and 26, and the base 12 may be fabricated from a variety of materials suitable for AFM or other probes, such as, for example, silicon, silicon nitride, silicon oxynitride, laminates of these or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr