About: http://webisa.webdatacommons.org/9469095

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, photo-resist is applied to a metal sheet having high heat-conductivity such as oxygen free copper, and the metal sheet with the photo-resist is exposed to light and developed to form a photo-resist pattern thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com