About: http://webisa.webdatacommons.org/94724781

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The material of the pellicle membrane 1 is not particularly limitative provided that the material is a plastic resin capable of giving a thin film of good mechanical strength having high transparency to the exposure light.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com