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About:
http://webisa.webdatacommons.org/94807308
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Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
The first conductive film and second conductive film each can be formed from an element selected from the group consisting of Ta, W, Ti, Mo, Al, Cu, Cr, and Nd, or an alloy or compound mainly containing the above elements.
http://www.w3.org/ns/prov#wasQuotedFrom
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