About: http://webisa.webdatacommons.org/94900829

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The chamber body can be constructed out of many particle free and dimensionally stable materials such as Aluminum, Stainless Steel, quartz, Pyrex glass or rigid plastics. [0101] Design for the Deposition Chamber Subsystem.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es