About: http://webisa.webdatacommons.org/94932578

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The recessed or cut-away portions 118 are filled with an insulating material such as polyimide or high resistivity polycrystalline silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com