PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The present invention relates to a semiconductor device having an SOI (Silicon On Insulator) structure and a manufacturing method thereof, and particularly to a semiconductor device having an isolation insulating film with its bottom surface not reaching a buried oxide film (hereinafter, referred to as a ???partial STI (Shallow Trench Isolation)???), and a manufacturing method thereof.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.fr