About: http://webisa.webdatacommons.org/9513816

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In either case, i.e. the blocks are silicon made with v-groove etch technology, or are molded from mold parts made using v-groove etch technology, the dimensions of the v-groove can be controlled very precisely, i.e. to <0.2 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com