About: http://webisa.webdatacommons.org/95167850

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method includes a step of providing an SOI wafer, such as one made by a process commonly termed separation by implanted oxygen (SIMOX).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es