About: http://webisa.webdatacommons.org/95227051

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The probe method according to claim 10, wherein said substrate is a semiconductor wafer, and said measuring object is a semiconductor chip.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com