About: http://webisa.webdatacommons.org/95279791

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The art is replete with many types of such handling mechanisms, including apparatus specifically designed for holding workpieces like semiconductor wafers, and transporting them between workstations and or wafer cassettes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com