About: http://webisa.webdatacommons.org/95283082

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The integrated circuit as claimed in claim 1 wherein the dielectric layer is a low dielectric layer having a dielectric constant under 3.9.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com