PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Wafer fabrication is a process particularly suited to run-to-run control, since wafer fabrication requires precise alignment between a photomask and a wafer.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.ca