| http://www.w3.org/ns/prov#value | - [0061] A semiconductor device production method in a facility using the above-described remote maintenance system will be described below. [0062]FIG. 8 is a flow of manufacturing microdevices (e.g., a semiconductor chip such as an IC or LSI, a liquid crystal panel, a CCD, a thin film magnetic head, and a micromachine).
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