About: http://webisa.webdatacommons.org/95889054

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 2n, a material such as Pt, W or RuO2 is deposited on the high dielectric film 34, thereby forming an upper electrode 35 of the capacitor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au