About: http://webisa.webdatacommons.org/9590612

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A manufacturing method of a probe head for a semiconductor LSI inspection apparatus according to claim 15, including the further step of plating a conductive material on the probes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr