About: http://webisa.webdatacommons.org/95936739

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 2A, according to the LOCOS method, a nitride film (Si3N4) 200 is formed in the surface portions of the substrate 100 other than the surface portions of the substrate 100 in which the element isolation regions are formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com