About: http://webisa.webdatacommons.org/9606515

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Among impurity elements which are mainly added in forming a film, atmospheric elements such as oxygen, nitrogen and carbon desirably have a concentration of 1???1020 cm???3 or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com