About: http://webisa.webdatacommons.org/96146325

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	alloy mainly comprising the metal is first formed by the use of the sputtering process, and then treated under an oxidizing atmosphere to form the oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com