About: http://webisa.webdatacommons.org/96454942

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	al layer on the substrate, and heat-treating said substrate to change said refractory and other material layers into said refractory metal alloy film. 6.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au