About: http://webisa.webdatacommons.org/96917734

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, as the width of various device components of transistors, including the S/D regions and gates, become smaller, the vertical depth of S/D regions must also be controlled, and the S/D regions are required to be shallower.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com