About: http://webisa.webdatacommons.org/9700761

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a positive voltage can be applied to the substrate, e.g. to increase the potential difference between the substrate and the targets and thus to increase plasma interaction with the target.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com