About: http://webisa.webdatacommons.org/97056942

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To form the transistor contact metal film, first, by using a film forming method such as sputtering, for example, three layers of titanium, aluminum, and titanium are stacked on the top face of the transistor protection film 18.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com