About: http://webisa.webdatacommons.org/97076471

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, high temperature, long-time processes such as oxidation or nitridation tend to induce crystallographic defects in the wafer, such as
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com