About: http://webisa.webdatacommons.org/97261439

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	orphous silicon, polycrystalline silicon, or a silicon substrate, and a wiring material such as aluminum, aluminum silicide, copper, or tungsten.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com