About: http://webisa.webdatacommons.org/97652345

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Using techniques such as photolithography and/or electron beam lithography [Rai-Choudhury, Handbook of Microlithography, Micromachining, and Microfabrication.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com