| http://www.w3.org/ns/prov#value | - Electrical and Systems Engineering (ESE) Mechanical Engineering and Applied Mechanics (MEAM) Email | Research Webpage Research Expertise: MEMS | Nanofabrication Combining insights from the worlds of electrical engineering, mechanical engineering, chemistry and materials science, Allen is a pioneer in the field of micro-electromechanical systems, or MEMS, and nanofabrication technology.
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