About: http://webisa.webdatacommons.org/98053520

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When forming the contact stud comprises, a metal film entirely filling the via hole and the upper hole is formed and the metal film except for the portion filling the via hole and the upper hole is removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr