About: http://webisa.webdatacommons.org/98143778

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The mechanical structures can be formed in or from single crystal silicon or other substrate and in or from a single wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com