About: http://webisa.webdatacommons.org/98349731

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The SOI substrate used was an 8-inch substrate fabricated by the method described in U.S. Pat. No. 5,371,037 cited earlier.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com