About: http://webisa.webdatacommons.org/98354751

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This barrier film 305 is formed by a material such as for example Ta, Ti, TaN, or TiN by the well known sputtering process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au