About: http://webisa.webdatacommons.org/98361484

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This step can be performed using suitable process such as grinding, chemical mechanical planarization (CMP) or etching, substantially as previously described for the planarizing and thinning step (FIG. 1C).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com